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    PPH15

    Abstract: pseudomorphic HEMT
    Text: PPH15 0.15µ µm Power PH-HEMT Process Description § § § § § § "Pseudomorphic" PM-HEMT technology 0.15µm gate length Double heterojunction GaAlAs/GaInAs/GaAlAs/GaAs epitaxial active layer 4" wafer Spiral inductors, MIM capacitors, TaN resistors, TiWSi resistors, GaAs resistors


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    PPH15 DSPPH151037 -06-Feb PPH15 pseudomorphic HEMT PDF